| Resistivity, MΩ·cm at 25 °C | Ultrapure Water 18.2 |
| TOC, ppb – with Quantum IX | |
| TOC, ppb – with Quantum EX | <10 |
| Particulates | 0.22 µm sterilizing filter |
| Dimensions (with 10 L reservoir attached) |
| Height, cm (in.) | 45.7 (18) |
| Width, cm (in.) | 25.5 (10) |
| Depth, cm (in.) | 50 (20) |
| Operating Weight (with full reservoir), kg (lb) | 29.5 (65.0) |
| Type I water flow rate (L/min) | Up to 0.6 |
| Type III water flow rate (L/hour) | Up to 5 |