| Parameter | Value |
| Resistivity | > 5 MΩ.cm @ 25 °C, typically 10 to 15 MΩ.cm* @ 25 °C |
| TOC typically | < 30 ppb |
| Parameter | Value |
| Bacteria | < 0.1 cfu/ml* |
| Particulates < 0.22 µm | < 1 particulate/ml* |
| Pyrogens (endotoxins) | < 0.001 EU/ml** |
| RNases | < 0.01 ng/ml** |
| DNases | < 4 pg/µl** |